On the determination of the sp3 to sp2 ratio in diamond-like carbon thin films

Date
1997
Authors
Mahajan, Somna S
Barshilia, H C
Mehta, B R
Vankar, V D
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Abstract
The carbon bonding ratio in diamond-like carbon (DLC) thin films has been estimated from the ε2 spectra obtained by spectroscopic ellipsometry. A method has been developed to find out the atomic fractions of sp3- and sp2-bonded carbon atoms by combining the various features of the existing methods. The atomic fraction of sp2-bonded carbon atoms has been determined by fitting the gaussian curves in the experimentally observed ε2, spectra in the low energy range (< 4 eV). The atomic fraction of sp3-bonded carbon atoms has been determined by calculating the total electron density in the DLC matrix. The amount of hydrogen present in DLC films has also been taken into account.
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Keywords
Carbon, Chemical vapour deposition, Ellipsometry, Optical properties
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