Fabrication of One-Dimensional Programmable-Height Nanostructures via Dynamic Stencil Deposition

Date
Authors
Wasserman, J. L.
Lucas, K.
Lee, S. H.
Ashton, A.
Crowl, C. D.
Markovic, N.
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
Description
Dynamic stencil deposition (DSD) techniques offer a variety of fabrication advantages not possible with traditional lithographic processing, such as the the ability to directly deposit nanostructures with programmable height profiles. However, DSD systems have not enjoyed widespread usage due to their complexity. We demonstrate a simple, low-profile, portable, one-dimensional nanotranslation system that facilitates access to nanoscale DSD abilities. Furthermore we show a variety of fabricated programmable-height nanostructures, including parallel arrays of such structures, and suggest other applications that exploit the unique capabilities of DSD fabrication methods.
Comment: 6 pages, 5 figures
Keywords
Condensed Matter - Mesoscale and Nanoscale Physics
Citation
Collections