Simultaneous detection of light elements by ERDA with gas-ionisation/Si ΔE-E detector telescope

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Date
1994
Authors
Avasthi, D K
Kabiraj, D
Bhagwat, A
Mehta, G K
Vankar, V D
Ogale, S B
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Abstract
Elastic Recoil Detection Analysis (ERDA) using ΔE-E telescope with gaseous ΔE detector is carried out for the first time for simultaneous detection of H alongwith other light elements C, N, and O in Diamondlike Carbon (DLC) films. The experimental data indicated the detection limit of 0.002 at.% for H and 0.006 at.% for N and O with 10% statistical inaccuracy.
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Keywords
elastic recoil detection analysis, diamondlike carbon
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