Bottom-Up Approach to Silicon Nanoelectronics

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Mizumita, Hiroshi
Oda, S.
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Abstract
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This paper presents a brief review of our recent work investigating a novel bottom-up approach to realize silicon based nanoelectronics. We discuss fabrication technique, electronic properties and device applications of silicon nanodots as a building block for nanoscale silicon devices.
Comment: Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
Keywords
Condensed Matter - Materials Science
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