Measuring the Capacitance of Individual Semiconductor Nanowires for Carrier Mobility Assessment

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Tu, Ryan
Zhang, Li
Nishi, Yoshio
Dai, Hongjie
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Abstract
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Capacitance-voltage characteristics of individual germanium nanowire field effect transistors were directly measured and used to assess carrier mobility in nanowires for the first time; thereby removing uncertainties in calculated mobility due to device geometries, surface and interface states and gate dielectric constants and thicknesses. Direct experimental evidence showed that surround-gated nanowire transistors exhibit higher capacitance and better electrostatic gate control than top-gated devices, and are the most promising structure for future high performance nanoelectronics.
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Condensed Matter - Materials Science
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