Hydrogen Profiling and the Stoichiometry of an a-Sin:H Film

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Date
1995
Authors
Avasthi, D K
Acharya, M G
Tarey, R D
Malhotra, L K
Mehta, G K
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Abstract
The stoichiometry of a-SiN, : H films is determined by conventional elastic recoil detection analysis (ERDA) using 90 MeV 58 Ni ions. Hydrogen depth profiling indicated that the non-uniformity in H concentration across the film thickness is about 12%. The present experiment indicated the capability of conventional ERDA for simultaneous multi-element detection in a thin film sample (having well-separated masses) without the use of a sophisticated detection system.
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Keywords
conventional elastic recoil detection analysis, using 90 MeV 58 Ni ions., non-uniformity in H concentration, film thickness is about 12%., simultaneous multi-element detection
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