On the determination of the sp3 to sp2 ratio in diamond-like carbon thin films

dc.creatorMahajan, Somna S
dc.creatorBarshilia, H C
dc.creatorMehta, B R
dc.creatorVankar, V D
dc.date.accessioned2006-01-24T09:55:46Z
dc.date.accessioned2019-02-09T08:21:00Z
dc.date.accessioned2022-07-11T08:43:28Z
dc.date.available2006-01-24T09:55:46Z
dc.date.available2019-02-09T08:21:00Z
dc.date.available2022-07-11T08:43:28Z
dc.date.created2006-01-24T09:55:46Z
dc.date.created2019-02-09T08:21:00Z
dc.date.issued1997
dc.description.abstractThe carbon bonding ratio in diamond-like carbon (DLC) thin films has been estimated from the ε2 spectra obtained by spectroscopic ellipsometry. A method has been developed to find out the atomic fractions of sp3- and sp2-bonded carbon atoms by combining the various features of the existing methods. The atomic fraction of sp2-bonded carbon atoms has been determined by fitting the gaussian curves in the experimentally observed ε2, spectra in the low energy range (< 4 eV). The atomic fraction of sp3-bonded carbon atoms has been determined by calculating the total electron density in the DLC matrix. The amount of hydrogen present in DLC films has also been taken into account.
dc.identifierThin Solid Films, 302(1-2), 250-255
dc.identifierhttp://localhost:8080/xmlui/handle/12345678/1280
dc.identifier.urihttps://demo7.dspace.org/handle/10673/7902
dc.languageen
dc.subjectCarbon
dc.subjectChemical vapour deposition
dc.subjectEllipsometry
dc.subjectOptical properties
dc.titleOn the determination of the sp3 to sp2 ratio in diamond-like carbon thin films
dc.typeArticle
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