Rare-earth Doped Amorphous Silicon Microdisk and Microstadium Resonators with Emission at 1550nm

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Figueira, D. S. L.
Frateschi, N. C.
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Microdisks and microstadium resonators were fabricated on erbium doped amorphous hydrogenated silicon (a-Si:H<Er>) layers sandwiched in air and native SiO2 on Si substrates. Annealing condition is optimized to allow large emission at 1550 nm for samples with erbium concentrations as high as 1.02x10^20 atoms/cm3. Near field scanning optical microscopy shows evidences of the simultaneous presence of bow-tie and diamond scars. These modes indicate the high quality of the resonators and the potentiality for achieving amorphous silicon microcavity lasers.
Comment: 18 pages, 4 figures. Submitted
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Physics - Optics
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