Microstructural Modification in Diamond-Like Carbon Thin Films Caused by High Energy Ion Irradiation

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Date
1995
Authors
Barshilia, H C
Sah, Somna
Mehta, B R
Vankar, V D
Avasthi, D K
Jaipal
Mehta, G K
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Abstract
The effect of high energy (85 MeV) nickel ions on diamond-like carbon thin films, deposited by microwave discharge of acetylene and methane gases mixed with hydrogen, has been investigated. IR, Raman and spectroscopic ellipsometry studies of irradiated and as-deposited films show large changes in their microstructural features. The effects of irradiation on films prepared from acetylene-hydrogen and methane-hydrogen gas mixtures are very different. Such a behaviour is proposed to be due to the microstructural variations in the as-deposited films.
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Keywords
Diamond; Infrared spectroscopy;, Ion bombardment;, Raman scattering
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